AIXTRON's ellipsoid diamond reactors are based on a development by the Frauenhofer Institute for Applied Solid State Physics, based in Freiburg, Germany. This patented microwave plasma CVD technology was transferred to AIXTRON for commercial use as part of an exclusive cooperation agreement.
As these diamond CVD systems manufacture synthetic diamonds of the highest mechanical, optical and thermal quality, they are used in a wide range of areas. Examples include the manufacture of freestanding diamond layers, which are used as optical or X-ray windows, thermal applications such as heat sinks, or the use of diamonds as an electronic material.
Technology
AIXTRON's microwave plasma CVD systems for manufacturing diamond layers are based on the ellipsoid reactor. Due to its special geometry, this reactor offers an unusually uniform coating of large substrates.
The reactor is integrated in a complete, automatically-controlled CVD system. This includes a vapor mixture, a vacuum system, mechanical devices for simple loading and unloading of the reactor, and computer-based control including a security system.
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