Boule Grower

SB 100 Sublimation

Seeded sublimation is the state-of-the-art technique to grow single crystal SiC ingots from a solid SiC powder source. The growth of high quality SiC crystals with lowest defect levels requires precise control of the temperature boundary conditions which is realized by the design of AIXTRON's Hot-Wall technology. The electrical conductivity of the bulk crystals is controlled by adding Nitrogen or Aluminium as donor or acceptor type impurities. more

HVPE

Hydride Vapor Phase Epitaxy (HVPE) is the oldest vapor phase epitaxy process for compound semiconductors.  As an epitaxy process that works near thermodynamic equilibrium, it is of particular interest for applications such as selective area growth, overgrowth of buried structures, and planar growth. more